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  4. Influence of ALD pulse times and deposition temperature on electrical properties and reliability of MIM decoupling capacitors based on Al-doped ZrO2 high-κ dielectric in BEoL conditions
 
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May 7, 2024
Conference Paper
Title

Influence of ALD pulse times and deposition temperature on electrical properties and reliability of MIM decoupling capacitors based on Al-doped ZrO2 high-κ dielectric in BEoL conditions

Abstract
This paper explores the impact of important ALD parameters, especially of precursor/reactant pulse times as well as of deposition temperature and the combination of them on the electrical performance and reliability of MIM decoupling capacitors with thin high-κ dielectric films based on amorphous Al-doped ZrO2 processed under BEoL-friendly conditions. Specifically, it examines key parameters like capacitance density (C0=9.3 nF/mm², κ=23.9) and field linearity (α=565 ppm/(MV/cm)²). It also assesses lifetime characteristics (tBD|150°C=3.6∙1010 s), while shedding light on the dominant conduction mechanism.
Author(s)
Falidas, Konstantinos Efstathios  orcid-logo
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Kühnel, Kati  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Everding, Maximilian
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Czernohorsky, Malte  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Heitmann, Johannes
TU Bergakademie Freiberg
Mainwork
IEEE EDTM 2024, IEEE Electron Devices Technology and Manufacturing Conference  
Conference
Electron Devices Technology & Manufacturing Conference 2024  
DOI
10.1109/EDTM58488.2024.10512192
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Fraunhofer Group
Fraunhofer-Verbund Mikroelektronik  
Keyword(s)
  • Dielectrics

  • MIM capacitors

  • Capacitors

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