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September 16, 2024
Presentation
Title
Laser direct imaging breaks new ground: Structuring of film thicknesses up to 20 µm for microelectronics
Title Supplement
Presentation held at 50th International Micro and Nano Engineering Conference, MNE 2024, September, 16th - 19th, 2024, Montpellier, France
File(s)
Rights
Use according to copyright law
Language
English