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  4. Humidity Impact on Thermal Conductivity Sensors
 
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2024
Journal Article
Title

Humidity Impact on Thermal Conductivity Sensors

Abstract
The thermal conductivity of humid air at different saturation levels has been investigated at 70 °C. A MEMS-based thermal conductivity sensor was calibrated and used to measure the thermal conductivity of humid air. The obtained results were compared to different equations for calculating the thermal conductivity of gas mixtures, in this case, dry air and water vapor. The selected equations predict contradicting behaviors of humid air at different temperatures and saturation levels. A semi-empirical equation by Melling et al. for the temperature range of 100 °C to 200 °C has shown the best agreement with the experimental data. We intend to study the temperature range from 0 to 100 °C in more detail and plan to adapt the interpolation to fit this temperature range.
Author(s)
Emperhoff, Sophie
Univ. Freiburg/Brsg., Institut für Mikrosystemtechnik -IMTEK-  
Eberl, Matthias
Infineon Technologies, Neubieberg
Dwertmann, Tim
Infineon Technologies (Germany)
Wöllenstein, Jürgen  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Journal
Proceedings. MDPI AG  
Conference
Eurosensors Conference 2023  
Open Access
DOI
10.3390/proceedings2024097093
Additional full text version
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Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • Thermal conductivity

  • Hydrogen

  • Humidity

  • Cross-sensitivity

  • MEMS

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