Manufacturing and Characterization of Silicon Electrostatic Micropumps on chip level

The field of micro electromechanical systems (MEMS) incorporates significant expertise and intricate engineering to create devices that require precise control at microscopic dimensions. The utilization of silicon, due to its robust electrical and mechanical properties, further accentuates its importance in constructing these sophisticated systems, especially micropumps. Micropumps are crucial for applications that demand accurate small volume fluid handling, such as in biomedical devices and chemical reactors. Previous designs predominantly utilized piezoelectric actuators, which, while effective, presented significant limitations, including sensitivity to temperature changes and material brittleness. The current study presented an intriguing shift from piezoelectric to electrostatic actuation, a move suggesting potential improvements in reliability, energy efficiency, and down scalability, particularly for silicon based technologies. The general problem being addressed in this study revolves around the lack of an electr ostatic silicon micropump at a miniaturized scale (5x5 mm), which could transcend the limitations of existing designs by decreasing power consumption and production costs while potentially increasing the market reach. The significant finding from the thesis is the successful design, fabrication, and evaluation of an innovative electrostatic micropump that employs electrostatic forces to initiate movement, rather than utilizing traditional piezoelectric materials. Electrostatic actuation, as revealed by this study, offers a simpler, lead free manufacturing process, and eliminates the necessity for extensive backend processes , thereby reducing environmental impact, and facilitating easier integration into mass produced devices. It also allows for further downs caling, indicating potential advancements in miniaturization beyond current technologies. By focusing on the assembly, testing, and optimization of the micropump structure and functionality, the results contribute significantly to the practical and theoretical understanding of microfluidic system design. This study bridges a critical gap by providing a more efficient, robust, and scalable solution to existing micropump technologies. This research not only enhances the technological arsenal available for precise microfluidic applications but also sets a foundation for future innovations in MEMS, potentially impacting a range of fields from healthcare to industrial processes. By pushing the boundaries of micropump efficiency and scalability, it paves th e way for more sustainable, cost effective solutions that could be widely adopted, transforming the landscape of precision fluid manipulation at microscopic scales.