Options
13 May 2024
Poster
Titel
Diffractive nanostructures for angle calibration of optical metrology systems
Titel Supplements
Poster presented at the Nanoscribe EMEA User Meeting, 13-14 Mai 2024, Eggenstein-Leopoldshafen
Abstract
Mobile optical metrology techniques face the problem of difficult alignment, e.g., in strain metrology of moving parts or for regular inspections. This time-consuming and costly step might become faster by an active angle calibration with diffractive nanostructures.We propose a design for diffractive nanostructures which allow for an active angle calibration.
Konferenz