CMOS-compatible Si-TiN Schottky SWIR photodetectors enhanced by pyramidal nanostructures

Short-wavelength infrared detection has shown an enormous potential for future application in autonomous systems and security. Up to today the use has been limited by the cost for high quality detectors. Using TiN Schottky barrier photodetectors with pyramidal photonic nanostructures opens a path to circumvent the typically low quantum efficiencies with compatibility to CMOS technology.