September 2023
Poster
Title

Comparison of Novel Charge-Based Wafer Inspection Technique to Optical Defect Mapping Techniques

Title Supplement
Poster presented at International Conference on Silicon Carbide and Related Materials, ICSCRM 2023, 17-22 September 2023, Sorrento, Italy
Author(s)
Karhu, Robin  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Nguyen, Sophia
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Albrecht, Kevin M.
Aixtron SE
Polisski, Gennadi
Semilab Germany GmbH
Wilson, Marshall
Semilab SDI
Kallinger, Birgit  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Fraunhofer Group