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  4. Miniaturized SMD-Reflow-Capable Photoacoustic CO2-Sensor Using a Dual-Chamber Approach
 
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2023
Conference Paper
Title

Miniaturized SMD-Reflow-Capable Photoacoustic CO2-Sensor Using a Dual-Chamber Approach

Abstract
The increasing interest in monitoring indoor air quality has led to a growing demand for simple and smallscale gas sensors. We present a miniaturized photoacoustic dual chamber sensor module that includes an infrared hotplate emitter and a wafer-level manufactured photoacoustic detector. The sensor module was controlled by a PSoC 4200M microcontroller and is capable of being soldered in a SMD reflow soldering process. The sensor prototype achieves a 3‑sigma noise level of 138 ppm CO2, which is suitable for most consumer applications.
Author(s)
Gaßner, Simon
Univ. Freiburg/Brsg., Institut für Mikrosystemtechnik -IMTEK-  
Essing, Simon
Tumpold, David
Infineon Technologies AG
Schmitt, Katrin  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Wöllenstein, Jürgen  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Mainwork
SMSI 2023, Sensor and Measurement Science International  
Conference
Conference "Sensor and Measurement Science International" 2023  
DOI
10.5162/SMSI2023/E7.1
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • Photoacoustic gas sensor

  • Gas sensor

  • Wafer-level

  • Carbon dioxide

  • MEMS

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