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  4. Non-resonant MOEMS mirror for laser cavity-length tuning
 
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2023
Conference Paper
Title

Non-resonant MOEMS mirror for laser cavity-length tuning

Abstract
High resolution spectroscopy via tunable lasers usually requires CW operation with mode-hop-free wavelength tuning. To suppress mode hopping by laser resonator-length tuning, Fraunhofer IPMS developed a novel electrostatic non-resonant translational micromirror. The combination of this device with a MOEMS grating within an external-cavity MIR QCL results in a miniaturized module that meets the requirements of high-resolution spectroscopy. The translational micromirror features a 5-mm aperture, an arbitrary actuator stroke of up to 120 µm and multiple independent electrostatic actuators to compensate for tip or tilt up to 350 µrad. We compare characterization and FEA simulation data, demonstrating the unique characteristics and the operational capability for a variety of applications.
Author(s)
Dreyhaupt, André  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Oswald, Lucas
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Graßhoff, Thomas  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Hugger, Stefan  
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Grahmann, Jan  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Mainwork
MOEMS and Miniaturized Systems XXII  
Conference
Conference "MOEMS and Miniaturized Systems" 2023  
DOI
10.1117/12.2667010
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Keyword(s)
  • quasi-static non-resonant micro-mirror

  • microoptoelectromechanical sysytems MOEMS

  • optical MEMES

  • translatory piston scan

  • electrostatic actuation

  • laser cavity resonator lenghth

  • mode-hop free laser wavelength tuning

  • optical coherence tomography OCT

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