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  4. A digital twin for PVD deposition of tailored coatings on 3D substrates
 
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2022
Conference Paper
Title

A digital twin for PVD deposition of tailored coatings on 3D substrates

Abstract
Due to its high film quality, reproducibility and deposition rate, magnetron sputtering is an established technology for production of optical filters. Optical devices benefit from the possibility to deposit coatings directly onto diffractive elements such as lenses. This reduces the number of components and internal reflections but requires a tailored thickness distribution, which is challenging to achieve e.g. via uniformity masks. We demonstrate that a digital twin derived from physical process modelling can successfully predict the deposition profile on 3D substrates and thereby minimize the number of pre-deposition experiments.
Author(s)
Pflug, Andreas  
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Bruns, Stefan  
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Zickenrott, Tobias  
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Britze, Chris  
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Vergöhl, Michael  
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
Mainwork
Optical Interference Coatings 2022  
Conference
Conference" Optical Interference Coatings" 2022  
DOI
10.1364/OIC.2022.TC.8
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST  
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