Depth-Resolved Elemental Analysis on Moving Electrode Foils with Laser-Induced Breakdown Spectroscopy

In this study, a new method for the inline measurement of depth profiles on a continuously moving sample with laser-induced breakdown spectroscopy is presented. The ablation profile is generated by ablating the sample with a burst of laser pulses, where the emission spectrum of each laser-induced plasma is analyzed on a spectrometer. A Q-switched Nd:YAG laser at 1064 nm with 10 mJ pulse energy, 6 ns pulse duration and 100 Hz repetition rate was used. The focusing lens for the pulsed laser and a deflection mirror are mounted on a moving stage, which is precisely aligned in height and orientation to the movement of a conveyor belt transporting the sample. The stage speed is actively synchronized to the speed of the moving sample by a wheel encoder to assure that all laser pulses hit the same position at the sample. The feasibility for depth-resolved elemental analysis on moving samples is shown for coatings of electrode foils for lithium-ion batteries. The coating homogeneity was measured at a speed up to 17 m/min. For a 100 µm coating, 10 laser pulses were needed to measure a full depth profile.