Control and Optimization of Patch-Antenna-Coupled THz Detector Performance using Superstrate Dielectric and Silicon Lens

We present the study on performance optimization and resonant frequency modification of terahertz detectors with the use of hyper-hemispherical silicon superstrate lenses. A series of detectors from 580 GHz to 2 THz which employ a monolithically integrated patch-antenna-coupled field-effect-transistor were fabricated in a commercial 65nm CMOS process of TSMC (Taiwan Semiconductor Manufacturing Company). We demonstrate that the resonance frequency with state-of-the-art optical performance can be efficiently controlled by the selection of a superstrate layer in the frequency range which exceeds 100 GHz. This technique can be employed for post-fabrication tailoring of detector resonance frequencies to target spectral lines.