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  4. CMOS-compatible fabrication of perforated membranes for filtration applications
 
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2022
Conference Paper
Title

CMOS-compatible fabrication of perforated membranes for filtration applications

Abstract
We report the development and successful implementation of a new process for manufacturing thin (< 1 µm) horizontal membranes with submicron holes on silicon chips for applications such as filtration, detection and/or separation of cells. Most of the currently available methods for manufacturing similar devices are not compatible with CMOS technology. The process proposed here, by contrast, combines standard i-line stepper lithography with (deep) reactive ion etching, ion beam etching and atomic layer deposition, allowing for a CMOS compatible fabrication. As the process exclusively uses standard microsystems technology operations on 200 mm silicon wafers it is also suitable for mass production. Moreover, the geometric parameters - including thickness/diameter, number, location and spacing of membranes, cavities and holes - are clearly defined and adjustable to the requirements of the different applications mentioned above. Scanning electron microscopy proved the successful creation of a stable membrane and the establishment of a connection between front and backside of the chips. In total, this may allow for a future integration of electrical functionalities into the chip, opening up new possibilities for further applications of the perforated membranes.
Author(s)
Brechmann, Noah Maximilian
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Michel, Marvin Daniel  orcid-logo
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Pickhinke, Andreas
Universität Duisburg, EBS
Schierbaum, Nicolas Peter
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Seidl, Karsten  
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Mainwork
Mikro-Nano-Integration. Beiträge des 9. GMM-Workshops 2022  
Conference
Workshop Mikro-Nano-Integration 2022  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • microsieves

  • perforated membrane

  • filtration

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