Tracing the Boron Diffusion into a Textured Silicon Solar Cell by Combining Boron Diffusion Simulation with Experimental and Simulated Scanning Transmission Electron Beam Induced Current

The light absorption of [001] grown single-crystalline silicon wafers can be enhanced by chemical etching with potassium hydroxide resulting in a pyramid-like surface texture. Alongside this advantageous property in the context of solar energy conversion, the surface roughness leads to drawbacks as well, e.g. difficulties in measuring diffusion behaviour of dopants in the heterogeneous struc- ture. In this paper, we employ experimental and simulated scanning transmission electron beam induced current in combination with the simulation of boron diffusion to map a sub 0.1 ppm iso-concentration line underneath the textured surface on the nanoscale. In order to account for surface recombination, an effective two-dimensional model projecting the system along the electron beam propagation direction is used in the finite elements EBIC simulation. We find a good agreement to the experimental data and discuss future strategies to eliminate remaining deviations inside the space charge region.