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  4. Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation
 
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2022
Journal Article
Title

Characterization of two-photon-polymerization lithography structures via Raman spectroscopy and nanoindentation

Abstract
Additive manufacturing using two-photon polymerization (TPP) lithography is increasingly used in industry and research. Parameter sweeps of cuboid structures fabricated using TPP lithography were investigated across the parameters of the laser power and scan speed to find dependent mechanical material properties. The employed photoresists were examined using Raman spectroscopy to find the degree of conversion (DC) of monomer to polymer, and subsequently, micro- or nanoindentation was used to find Young’s modulus (E). For the photoresist IP-Dip, the attained DC and E ranged from 20% to 45% and 1 to 2.1 GPa, respectively. The results were compared with reports found in the literature. For IP-Q, the attained DC and E ranged from 53% to 80% and 0.5 to 1.3 GPa, respectively. The characterized properties of IP-Q manifest as the current state of knowledge of the material.
Author(s)
Schweiger, Severin  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Schulze, Tim
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Schlipf, Simon  
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Reinig, Peter  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Schenk, Harald  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Journal
Journal of optical microsystems  
Open Access
DOI
10.1117/1.JOM.2.3.033501
Language
English
Fraunhofer-Institut für Keramische Technologien und Systeme IKTS  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Keyword(s)
  • two-photon polymerization

  • Raman spectroscopy

  • nanoindentation

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