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2022
Conference Paper
Title
Proven Power Cycling Reliability of SmartSiC™ Substrate for Power Devices
Abstract
The Smart Cut™ technology enables the integration of a high-quality SiC layer transfer for device yield optimization, combined with a low-resistivity handle wafer (below 5mOhm.cm) to lower device conduction and switching losses. More than 550000 cycles without any failure have been demonstrated during Power Cycling Tests, with a temperature swing of 120K. Evolution of thermal resistance is within the specification of AQG324 standards (2021 revision). This test is a validation of the reliability of our SmartSiC™ engineered substrate.
Author(s)