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  4. Beam Shaping the Direct Laser Interference Patterning Spot
 
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2022
Journal Article
Title

Beam Shaping the Direct Laser Interference Patterning Spot

Author(s)
Pongratz, Ludwig  
Fraunhofer-Institut für Lasertechnik ILT  
Vannahme, Kai  
Fraunhofer-Institut für Lasertechnik ILT  
Journal
Journal of Laser Micro/Nanoengineering. Online journal  
Open Access
DOI
10.2961/jlmn.2022.01.2007
Language
English
Fraunhofer-Institut für Lasertechnik ILT  
Keyword(s)

  • Direct Laser Interference Pattering DLIP

  • beam shaping

  • homogenous topography

  • large area periodic textures

  • increase of throughput

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