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  4. Direct laser writing of metal nanostructures from the gas phase by two-photon-absorption process
 
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2021
Conference Paper
Title

Direct laser writing of metal nanostructures from the gas phase by two-photon-absorption process

Abstract
A new approach for the generation of three-dimensional metal nanostructures, based on two-photon-absorption (TPA) of fs-laser radiation on silver-precursor molecules in the gas phase, is introduced. For that, a mode-locked fs-laser of 800 nm central wavelength and a pulse duration of 10 fs at a frequency of 76 MHz is used. The deposition process is performed in a vacuum chamber, allowing for evaporating a liquid organometallic silver-precursor under controlled temperature and pressure conditions. An inverse microscope objective of NA=0.65 and a working distance of 0.57 mm is used to focus the beam through a sapphire window onto a substrate, fixed in the vacuum chamber. The focus is moved in space by means of a piezo-driven stage with nm-resolution. Two-dimensional silver structures with dimensions in the sub-micrometer range are successfully deposited from the gas phase on glass substrates. Future investigations aim for extending the method into the third dimension.
Author(s)
Schwarz, Nicolai
Baßler, Michael  
Walther, Thomas
Klotzbücher, Thomas  
Mainwork
Lasers in Manufacturing Conference 2021. Proceedings  
Project(s)
LAMETA
Funder
Bundesministerium für Bildung und Forschung BMBF (Deutschland)  
Conference
Lasers in Manufacturing Conference (LiM) 2021  
World of Photonics Congress 2021  
Link
Link
Language
English
Fraunhofer-Institut für Mikrotechnik und Mikrosysteme IMM  
Keyword(s)
  • two-photon absorption

  • femtosecond laser direct writing

  • metallic nanostructures

  • gas-phase

  • silver precursor

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