Capacitive Micromachined Ultrasonic Transducers (CMUT) Utilized as Tactile Sensors
Abstract
In this paper, Fraunhofer IPMS utilized its capacitive micromachined ultrasonic transducer(CMUT) technology for the evaluation of highly sensitive tactile sensors. The response of the sensor devices with two different coating materials upon pressure cycles was investigated by capacitive measures. The CMUTs successfully work as tactile sensor units. It was shown that OrmoComp® is beneficial for applications with a primary requirement for high sensitivity (3.52 aF/Pa). SU8 is the preferable material for applications needing short response times (0.8 s).
