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  4. Capacitive Micromachined Ultrasonic Transducers (CMUT) Utilized as Tactile Sensors
 
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2021
Konferenzbeitrag
Titel

Capacitive Micromachined Ultrasonic Transducers (CMUT) Utilized as Tactile Sensors

Abstract
In this paper, Fraunhofer IPMS utilized its capacitive micromachined ultrasonic transducer(CMUT) technology for the evaluation of highly sensitive tactile sensors. The response of the sensor devices with two different coating materials upon pressure cycles was investigated by capacitive measures. The CMUTs successfully work as tactile sensor units. It was shown that OrmoComp® is beneficial for applications with a primary requirement for high sensitivity (3.52 aF/Pa). SU8 is the preferable material for applications needing short response times (0.8 s).
Author(s)
Köble, S.
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Krenkel, M.
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Koch, S.G.
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Urbahn, C.
Fraunhofer-Institut für Fabrikbetrieb und -automatisierung IFF
Hauptwerk
44th International Spring Seminar on Electronics Technology, ISSE 2021
Konferenz
International Spring Seminar on Electronics Technology (ISSE) 2021
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DOI
10.1109/ISSE51996.2021.9467603
Language
Englisch
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