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  4. Simple and Powerful encapsulation through Hybrid Packaging for Electrochemical Transducers
 
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2021
Conference Paper
Title

Simple and Powerful encapsulation through Hybrid Packaging for Electrochemical Transducers

Abstract
We present a simple and reliable hybrid packaging of rigid electrochemical transducers and flexible foil having electrical connections. Among a large number of biochemical transducers, we target in this work two types of transducers: 3-electrode systems and ion selective field effect transistors (ISFET). The hybrid packaging ensures several requirements such as: biocompatibility to biological analytes, precise tight encapsulation, protection of transducers surface, mechanical stability, reliable electrical contact and light shielding of sensitive parts. The proposed hybrid packaging of biochemical transducers is based on a flip-chip bonding process, which necessitates low-cost materials, a reduced number of processing steps as well as compatibility to common roll-to-roll (R2R) processes.
Author(s)
Steinmaßl, Matthias  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Boudaden, Jamila  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Hell, Waltraud  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Kutter, Christoph  
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Mainwork
Smart Systems Integration, SSI 2021  
Conference
International Conference and Exhibition on Smart Systems Integration (SSI) 2021  
DOI
10.1109/SSI52265.2021.9466968
Language
English
Fraunhofer-Einrichtung für Mikrosysteme und Festkörper-Technologien EMFT  
Keyword(s)
  • flexible hybrid packaging

  • encapsulation

  • chemical sensor

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