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2020
Conference Paper
Titel
Layer-thickness measurements with incoherent terahertz light
Abstract
We recently demonstrated the use of incoherent light from a superluminescent diode to drive a terahertz crosscorrelation spectroscopy system. Its application to layer-thickness measurement tasks is the scope of this contribution. The limitations and a comparison to layer-thickness measurements with a standard time-domain spectroscopy system is discussed with a special focus of the bandwidth-dependence of the layer-thickness evaluation result.