A design and manufacturing platform for AlScN based highly linear quasi-static MEMS mirrors with large optical apertures

In this work, 2D MEMS quasi-static mirrors based on piezoelectric, non-ferroelectric AlScN/AlN actuators with three different mirror plates (diameters of 2 mm, 5 mm and 10 mm) using a design and manufacturing platform will be reported. While the AlN/AlScN driving actuators ensure high linearity and large tilting angles, the multiple-waferbonding technique via glass fritting enables 3D construction of the MEMS mirrors and hermetic sealing. Even though there is no request on vacuum package for quasi-static driving, hermitic sealing on wafer level with appropriate interior pressure level within the sealing improves the mechanical robustness of the MEMS components and protects them from the particles and humidity from the environment. Since the main design concept was adopted from the previous work and adapted for different aperture sizes, this paper will focus on reporting further simulation results on mechanical behaviors, especially shock survivability under very harsh environment, the technology efforts and results of utilizing such a design and manufacturing platform for AlScN/AlN driven MEMS mirrors.