Electrostatic All-Silicon MEMS Speakers for In-Ear Audio Applications - Acoustic Measurements and Modelling Approach

This paper presents the acoustic properties of an electroacoustic MEMS transducer. The transducer is based on electrostatic bending actuators with lateral deflection. A large number of actuators is arranged in pairs and move in opposite phase between a cover and a handle wafer. By means of an appropriate sound guidance, areas of opposite phase pressure changes are separated and audible sound is emitted. In this paper, the results of acoustic measurements with a standard ear simulator are discussed. A linear lumped parameter model is presented and the results of the simulations are compared with the measurements.