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Doping hafnium oxide by in-situ precursor mixing
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2019
Presentation
Title
Doping hafnium oxide by in-situ precursor mixing
Title Supplement
Presentation held at Fachtagung "VAKUUM & PLASMA", V2019, 8. - 10. Oktober 2019, Dresden, Germany
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Author(s)
Weinreich, Wenke
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mart, Clemens
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Kühnel, Kati
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Kämpfe, Thomas
Czernohorsky, Malte
Conference
Fachtagung "Vakuum & Plasma" 2019
File(s)
Embargo.pdf (409.32 KB)
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Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
