Development of a 3D-integrated thermocatalytic sensor for combustible gas detection

A process to integrate a thermocatalytic sensor on top of a CMOS circuitry is presented. Therefore, COMSOL Multiphysics® simulations are performed to evaluate a heater with an optimized temperature uniformity and a suspended design of the sensor element to achieve thermal decoupling from the substrate. The steps for fabrication are shortly described using ALD materials and a sacrificial layer. An example for a released heater structure is shown.