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  4. Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis
 
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2019
Conference Paper
Title

Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis

Abstract
Photoacoustic (PA) spectroscopy is among the most sensitive techniques used to monitor chemical emission or detect gas traces. In the mid-infrared, where most of gases of interest have their strongest absorption lines, this technique takes advantage of the high optical power and room temperature operation of quantum cascade lasers (QCL). We have recently demonstrated that centimeter-size PA cells can compete, with bulky commercial systems for gas sensing without any compromises on performances. We demonstrate a new step towards cost reduction, extreme integration, and mass deployment of such PA sensors with a miniaturized silicon PA-cell fabricated on standard CMOS tools. The design, fabrication and characterizations of this new sub-centimeter PA cell built on a silicon platform are presented. First, the component has been designed using a detailed physical model, accounting for viscous and thermal losses, and metamodel-based optimization techniques. Second, it has been fabricated on our 200 mm CMOS pilot line. Several wafers have been released and diced. Single chips have then been assembled with commercial capacitive microphones and finally characterized on our reference gas bench. The photoacoustic simulations and the acoustics experiments are in a good agreement. The tiny PA cell exhibits a sensitivity down to the ppm level for CO2 at 2300 cm-1, as well as for CH4 at 3057 cm-1 even in a gas flow. Taking advantage of the integration of QCLs on Si and photonic circuitry, the silicon PA cell concept is currently being extended towards a fully integrated multigas detector.
Author(s)
Coutard, Jean-Guillaume
Glière, Alain
Fedeli, Jean-Marc
Lartigue, Oliver
Skubich, Jules
Aoust, Guillaume
Teulle, Alexandre
Strahl, Thomas  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Nicoletti, Sergio
Carras, Mathieu
Duraffourg, Laurent
Mainwork
MOEMS and Miniaturized Systems XVIII  
Project(s)
REDFINCH  
Funder
European Commission EC  
Conference
Conference "MOEMS and Miniaturized Systems" 2019  
Conference "Optoelectronics, Photonic Materials and Devices" 2019  
DOI
10.1117/12.2506514
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • Miniaturized Gas Sensor

  • QCL

  • MIR

  • silicon

  • CMOS Pilot Line

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