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  4. Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cells
 
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2018
Conference Paper
Title

Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cells

Abstract
In this publication we discuss inline aspects of fabricating freestanding epitaxially grown thin silicon for solar cells. Especially the inline electrochemical porosification and its limitations are discussed and homogeneity improvements achieved with aid of electric simulations are presented. Different types of inhomogeneity for porous silicon layers lead to difficulties when forming a proper separation layer through reorganization and the detachment yield of the epitaxial thin film is affected. One of the solutions to ensure good detachment of the films is to form several local separation layers in a kind of puff pastry like structure where detachment of epitaxial film might proceed in any of the separation layers thus increasing yield. However, in case of too high porosity of the highly porous layer, large cavities without smaller supporting silicon pillars can collapse during reorganization and the surface layer can re-attach to the substrate making detachment of this area impossible. Additionally, local warping of the reorganized template before epitaxy can lead to detrimental defects like stacking faults.
Author(s)
Ivanov, Alexey
Fraunhofer-Institut für Solare Energiesysteme ISE  
Sorgenfrei, Ralf
Gust, Elke  
Fraunhofer-Institut für Solare Energiesysteme ISE  
Barth, Philipp  
Fraunhofer-Institut für Solare Energiesysteme ISE  
Nieuwenhuysen, Kris van
imec
Kühnhold-Pospischil, Saskia  
Fraunhofer-Institut für Solare Energiesysteme ISE  
Riepe, Stephan  
Fraunhofer-Institut für Solare Energiesysteme ISE  
Janz, Stefan  
Fraunhofer-Institut für Solare Energiesysteme ISE  
Mainwork
35th European Photovoltaic Solar Energy Conference and Exhibition 2018  
Project(s)
CHEETAH  
Funder
European Commission EC  
Conference
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) 2018  
DOI
10.24406/publica-r-402504
10.4229/35thEUPVSEC20182018-2AO.6.6
File(s)
Download (789.32 KB)
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
Keyword(s)
  • thin film solar cell

  • manufacturing and processing

  • porous silicon

  • epitaxy

  • electrochemical etching

  • Silicium-Material

  • Photovoltaik

  • Silicium-Photovoltaik

  • Epitaxie

  • Si-Folien und SiC-Abscheidungen

  • film solar cell

  • processing

  • silicon

  • etching

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