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  4. Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
 
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2018
Conference Paper
Titel

Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation

Abstract
In this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. The device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. Extensive finite element analysis studies have revealed a very high SPL of more than 79 dB in 10 cm distance at 500 Hz for a device 1 cm² in size operated at 30 V. At higher frequencies even larger SPL values are calculated enabling a flat frequency response with 89 dB for frequencies above 800 Hz. Based on this concept first speaker prototypes have been fabricated using MEMS technology.
Author(s)
Stoppel, F.
Niekiel, F.
Giese, T.
Gu-Stoppel, S.
Männchen, A.
Nowak, J.
Beer, D.
Wagner, B.
Hauptwerk
143rd Audio Engineering Society International Convention 2017
Konferenz
Audio Engineering Society (AES International Convention) 2017
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