Enhanced behavioral models of MEMS elements for system level verification

This work presents an efficient approach to describe enhanced detailed mechanical behaviour of MEMS elements equivalent to a complex distributed spring mass system, which also contains weak nonlinearities on its eigenmodes. Based on an reduced order state space description of its FE mesh model the dynamic behaviour including higher eigenmodes can be simulated on system level. The core of this paper addresses the superposition of the state space model with additional suited fractional differential equations to describe stiffness variations and nonlinear behaviour in more realistic test scenarios. The discussed models are implemented in SystemC AMS - this open hardware description standard provides well suited capabilities for multi-physical domain simulations.