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  4. Customized BSOI wafers integration of additional interconnects into the handle wafer
 
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2017
Presentation
Title

Customized BSOI wafers integration of additional interconnects into the handle wafer

Title Supplement
Presentation held at Waferbond 2017, the International Conference on Wafer Bonding, 27 - 29 November 2017, Leuven, Belgium
Author(s)
Kaden, Christiane
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Langa, Sergiu  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Conference
International Conference on Wafer Bonding (Waferbond) 2017  
Request publication:
bibliothek@ipms.fraunhofer.de
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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