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  4. MEMS-based array for hydrogen sulfide detection employing a phase transition
 
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2017
Conference Paper
Title

MEMS-based array for hydrogen sulfide detection employing a phase transition

Abstract
The monitoring of hydrogen sulfide in biogas is crucial due to its highly corrosive properties. Most notably, the lifetime of heat and power generation machinery suffers from high levels of hydrogen sulfide. Here an approach to enable large-scale, low cost deployment of selective, quasi-continuous hydrogen sulfide detection systems is presented. A chip featuring three individually controllable hotplates has been developed for this purpose. Each hotplate device consists of a heating structure and an interdigitated electrode structure, which we use to control the temperature and determine the resistivity of copper(II)oxide nanospheres, respectively. The fundamental process to determine the hydrogen sulfide concentration is based on a phase transition that occurs in the temperature regime below 200°C. The transition process may be reversed at temperatures above 300°C thus resetting the sensing layer. However, the reversal takes times, which is why we use a total of six hotplates simultaneously to enable a quasi-continuous monitoring of the hydrogen sulfide concentration.
Author(s)
Bierer, Benedikt  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Dinc, Mahmut Cem
Univ. Freiburg
Gao, Haitao
Univ. Freiburg
Wöllenstein, Jürgen  
Univ. Freiburg/Brsg.  
Palzer, Stefan
Univ. Freiburg
Mainwork
Smart Sensors, Actuators, and MEMS VIII  
Conference
Conference "Smart Sensors, Actuators, and MEMS" 2017  
DOI
10.1117/12.2265743
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • nanoparticle

  • Copper(II)Oxide

  • MEMS hotplate array

  • gas sensing

  • hydrogen sulfide

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