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2017
Presentation
Title
Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching
Title Supplement
Presentation held at FOR3NANO: Formation of 3D Nanostructures by Ion Beams, June 28 - June 30, Helsinki, Finland
Author(s)
Project(s)
Nanostrukturierte Cochleaelektroden zur elektrischen Charakterisierung sowie zur Manipulation von Zellen