2016
Presentation
Title

Efficient simulation of EUV pellicles

Title Supplement
Presentation held at 14th Fraunhofer IISB Lithography Simulation Workshop, September 22 - 24, 2016, Hersbruck, Germany
Author(s)
Evanschitzky, Peter  
FhG IISB
Erdmann, Andreas  
FhG IISB
Project(s)
Funder
Conference
DOI
File(s)
Rights
Under Copyright
Language
English