An integrated dual-polarity high-voltage driver concept for micropump applications

We present a high-voltage DC/DC converter concept aimed to drive piezo-electric microfluidic elements, specifically micro-pumps for medical drug-dosing applications. The proposed high-voltage driver combines the advantages of DC/DC boost converters with the benefits of Dickson charge pumps. The topology comprises one high-voltage NMOS switch that is used to generate high-voltage, dual polarity output amplitudes where gains of factor 14 (for negative amplification) and 30 (for positive amplification) are achieved from a nominal supply voltage of 5 V. The driver was designed and simulated in 0.35-μm XFAB high-voltage technology (XU035). The proposed design is the first step towards preparing a high-voltage IC driver for supporting a MEMS micro-fluidic element. The topology behavior depending on the circuit load (i.e. micro-pump dimensions) and supply voltage are investigated and guidelines for optimal use are given.