Best practice approaches for stress measurements on thin layer stacks

As illustrated for single cases, the residual stress analysis based on FIB milling and DIC analysis has a large potential to determine residual stresses in thin layer systems. For the introduction of the FIB-DIC approach as industrial method, measurement automation with time saving fast measurement routines, cost efficient and validated measurement procedures are a basic prerequisite. A best practice report under preparation (in [6]) will give the industrial user guidance to implement and use the FIBDIC method with own equipment. Besides instructions to get started fast, a wide experience in applying the FIB-DIC method will be presented. It allows preparation of suitable measurement routines for customer specific problems, avoiding elaborate trial-and-error tests.