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  4. High-voltage monolithic 3D capacitors based on through-silicon-via technology
 
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2015
Poster
Title

High-voltage monolithic 3D capacitors based on through-silicon-via technology

Title Supplement
Poster presented at IITC-MAM 2015, IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference, 18-21 May 2015, Grenoble
Author(s)
Grünler, Saeideh
Rattmann, Gudrun  
Erlbacher, Tobias  
Bauer, Anton
Frey, Lothar
Project(s)
ATHENIS 3D
Funder
European Commission EC  
Conference
International Interconnect Technology Conference (IITC) 2015  
Materials for Advanced Metallization Conference (MAM) 2015  
DOI
10.24406/publica-fhg-390648
File(s)
N-374849.pdf (1.44 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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