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HIPIMS - an ionized sputtering technology arriving in industry
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2015
Conference Paper
Title
HIPIMS - an ionized sputtering technology arriving in industry
Author(s)
Bandorf, R.
Mainwork
HDPF 2015, Taiwan High-density Plasma Coating Forum
Conference
Taiwan High-Density Plasma Coating Forum (HDPF) 2015
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
