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  4. Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysis
 
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2015
Presentation
Title

Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysis

Title Supplement
Presentation held at International Conference on Silicon Carbide and Related Materials, ICSCRM 2015, Giardini Naxos, Italy, October, 4th - 9th, 2015
Author(s)
Oppel, Steffen
Intego Vision Systeme GmbH
Schneider, Adrian
Intego Vision Systeme GmbH
Schütz, Michael
Intego Vision Systeme GmbH
Kaminzky, Daniel
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Kallinger, Birgit  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Weber, Jonas
Lehrstuhl für Angewandte Physik, FAU Erlangen-Nürnberg
Krieger, Michael
Lehrstuhl für Angewandte Physik, FAU Erlangen-Nürnberg
Project(s)
SiC-WinS
Funder
Bayerische Forschungsstiftung BFS  
Conference
International Conference on Silicon Carbide and Related Materials (ICSCRM) 2015  
File(s)
Download (646.95 KB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-389286
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • photoluminescence

  • defects

  • Silicon Carbide (SiC)

  • defect luminescence scanner

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