2015
Poster
Title

Metastable defects in proton implanted and annealed silicon

Title Supplement
Poster presented at GADEST 2015, 16th Conference on Gettering and Defect Engineering in Semiconductor Technology, September 20th to 25th, 2015, Bad Staffelstein, Germany
Author(s)
Jelinek, Moriz
Infineon Technologies Austria AG
Laven, Johannes G.
Infineon Technologies AG
Ganagona, N.
Infineon Technologies Austria AG
Job, R.
Muenster University of Applied Sciences
Schustereder, Werner
Infineon Technologies Austria AG
Schulze, Hans-Joachim
Infineon Technologies AG
Rommel, Mathias  orcid-logo
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Frey, Lothar
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Conference
DOI
File(s)
Rights
Under Copyright
Language
English
Keyword(s)