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  4. Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
 
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2015
Conference Paper
Title

Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera

Abstract
This paper presents a large aperture micro scanning mirror (MSM) array especially developed for the novel 3D-laser camera Fovea3D. This 3D-camera uses a pulsed ToF technique with 1MVoxel distance measuring rate and targets for a large measurement range of 30 ... 100m and FOV of 120 degrees x60 degrees at video like frame rates. To guarantee a large reception aperture of >= 20mm, large FOV and 3200 Hz bi-directional scanning frequency at the same time, a hybrid assembled MSM array was developed consisting of 22 reception mirrors and a separate sending mirror. A hybrid assembly of frequency selected scanner elements and a driving in parametric resonance were chosen to enable a fully synchronized operation of all scanner elements. For position feedback piezo-resistive position sensors are integrated on each MEMS chip. The paper discusses details of the MEMS system integration including the synchronized operation of multiple scanning elements.
Author(s)
Sandner, T.
Baulig, C.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Grasshoff, T.
Wildenhain, M.
Schwarzenberg, M.
Dahlmann, H.-G.
Schwarzer, S.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Mainwork
MOEMS and Miniaturized Systems XIV  
Conference
Conference "MOEMS and Miniaturized Systems" 2015  
DOI
10.1117/12.2076440
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
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