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2014
Poster
Title
Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography
Title Supplement
Poster presented at NNT 2014, 13th International Conference on Nanoimprint and Nanoprint Technology, Kyoto, Japan, October 22-24, 2014
Author(s)
File(s)
Rights
Use according to copyright law
Language
English
Keyword(s)