2013
Poster
Title

Characterization of a MID-volume fabrication process for CMUT development

Title Supplement
Poster presented at IEEE International Ultrasonics Symposium, IUS 2013, 21.-25. July 2013, Prague, Czech Republic
Author(s)
Unamuno, Anartz
Friedrichs, Martin  
Jeroch, Werner  
Grüger, Heinrich  
Conference
Language
English