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  4. In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists
 
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2013
Poster
Title

In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists

Title Supplement
Poster presented at 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, October 21-23, 2013, Barcelona, Spain
Author(s)
Verschuuren, Marc
Philips Corporate Research, 5656 AE, Eindhoven, The Netherlands
Fader, Robert
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Brakel, Remco van
Philips Corporate Research, 5656 AE, Eindhoven, The Netherlands
Hurxkens, Gert-Jan
Philips Corporate Research, 5656 AE, Eindhoven, The Netherlands
Conference
International Conference on Nanoimprint & Nanoprint Technology (NNT) 2013  
DOI
10.24406/publica-fhg-381474
File(s)
004.pdf (1.71 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
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