2013
Poster
Title

In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists

Title Supplement
Poster presented at 12th International Conference on Nanoimprint & Nanoprint Technology, NNT 2013, October 21-23, 2013, Barcelona, Spain
Author(s)
Verschuuren, Marc
Philips Corporate Research, 5656 AE, Eindhoven, The Netherlands
Fader, Robert
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Brakel, Remco van
Philips Corporate Research, 5656 AE, Eindhoven, The Netherlands
Hurxkens, Gert-Jan
Philips Corporate Research, 5656 AE, Eindhoven, The Netherlands
Conference
DOI
File(s)
Rights
Under Copyright
Language
English