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2013
Poster
Title
HCl assisted growth of thick 4H-SiC epilayers for bipolar devices
Title Supplement
Poster presented at ICSCRM 2013, International Conference on Silicon Carbide and Related Materials, September 29 - October 4, 2013, Miyazaki, Japan
Author(s)
File(s)
Rights
Use according to copyright law
Language
English