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Progress in miniaturization of a MEMS based hybrid-integrated NIR spectrometer
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2012
Conference Paper
Title
Progress in miniaturization of a MEMS based hybrid-integrated NIR spectrometer
Author(s)
Grüger, Heinrich
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Scholles, Michael
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
Mainwork
Sensors Expo & Conference 2012
Conference
Sensors Expo & Conference 2012
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
