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  4. Thermal laser separation - damage-free and Kerfless cutting of wafers and solar cells
 
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2012
Conference Paper
Title

Thermal laser separation - damage-free and Kerfless cutting of wafers and solar cells

Abstract
Thermal Laser Separation (TLS) is a damage free and kerfless dicing technology for brittle materials like silicon (Si) wafers and solar cells. By using a defined stress field, due to laser-based heating and subsequent water cooling, one single crack is guided through, e.g., a silicon substrate. This paper describes important aspects and benefits of TLS thus deriving major potential photovoltaic (PV) applications for TLS. Latest experimental results, finite element (FE) simulations, as well as theoretical considerations are taken into account. As a result, TLS is as a novel technology for cutting crystalline solar cells and wafers.
Author(s)
Koitzsch, Matthias
Lewke, Dirk
Kaule, Felix
Oswald, Marcus
Schoenfelder, Stephan
Turek, Marko  
Büchel, Andreas
Zühlke, Hans-Ulrich
Mainwork
6th International Workshop on Crystalline Silicon for Solar Cells, CSSC 2012  
Conference
International Workshop on Crystalline Silicon Solar Cells (CSSC) 2012  
File(s)
Download (501.82 KB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-377892
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Fraunhofer-Institut für Werkstoffmechanik IWM  
Keyword(s)
  • Kerfless cutting

  • crystalline silicon

  • solar cell

  • wafer dicing

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