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Design and manufacturing of micro synthetic jet actuators
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2012
Conference Paper
Title
Design and manufacturing of micro synthetic jet actuators
Author(s)
Gebauer, C.
Schueller, M.
Hiller, Karla
Schulze, R.
Otto, Thomas
Geßner, Thomas
Mainwork
Smart Systems Integration 2012. CD-ROM
Conference
International Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components 2012
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
