2012
Poster
Title

Plasma-assisted atomic layer deposition of alumina at room temperature

Title Supplement
Poster at 17th Workshop on Dielectrics in Microelectronics (WoDiM 2012), June 25-27, 2012, Dresden
Author(s)
Lemberger, Martin
Fromm, Timo
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, Lothar
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)