2012
Poster
Title

Nanoscale characterization of TiO2 films grown by atomic layer deposition

Title Supplement
Poster at 17th Workshop on Dielectrics in Microelectronics, June 25-27, 2012, Dresden
Author(s)
Murakami, Katsuhisa
Rommel, Mathias  orcid-logo
Bauer, A.J.
Frey, Lothar
Hudec, Boris
Rosova, A.
Hueková, K.
Fröhlich, Karol
Kasikov, A.
Ramula, R.
Aarik, J.
Han, J.H.
Han, S.
Lee, W.
Song, S.J.
Hwang, C.S.
Conference
File(s)
Rights
Use according to copyright law
DOI
Language
English
Keyword(s)