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  4. Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM
 
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2012
Presentation
Title

Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM

Title Supplement
Presentations held at 17th Workshop on Dielectrics in Microelectronics, June 25-27, Dresden, Germany
Author(s)
Rommel, Mathias  orcid-logo
Jambreck, Joachim D.
Murakami, Katsuhisa
Lemberger, Martin
Richter, Christoph
Weinzierl, Philip
Bauer, A.J.
Frey, Lothar
Conference
Workshop on Dielectrics in Microelectronics (WoDiM) 2012  
DOI
10.24406/publica-fhg-376163
File(s)
001.pdf (6.62 MB)
Rights
Under Copyright
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • tunneling AFM

  • TUNA

  • conductive AFM

  • cAFM

  • parasitic capacitance

  • displacement current

  • shielded AFM probes

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